China: While China is actively working to develop its own lithography capabilities, it currently lags behind the aforementioned countries in producing advanced DUV lithography systems capable of manufacturing leading-edge semiconductors. Recent reports from late 2024 and early 2025 suggest some progress in developing DUV laser technology, but widespread manufacturing capability for advanced DUV scanners is not yet established.
In summary, the Netherlands (ASML) and Japan (Nikon and Canon) are the primary countries currently manufacturing DUV lithography systems. Germany is a key player through its supply of essential optics. The United States is critical in the supply chain of components for these machines.
