早在2016年台積電已經實現了通過多次曝光光刻利用DUV 生產7納米，隨著EUV到貨，很快就淘汰多次曝光光刻

來源: amico 於 2024-02-07 11:56:08 [舊帖] [給我悄悄話] 本文已被閱讀：次

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